期刊文献+

回转对称微结构光学模具的超精密切削B轴旋转加工工艺

B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting
收藏 分享 导出
摘要 为避免回转对称微结构光学模具加工中产生的毛刺、尖角缺损及表面划痕,提出一种基于超精密切削的B轴旋转加工工艺。通过实验研究加工路径、切削速度、B轴旋转速度及切深等影响微模具面形精度和表面质量的主要因素,优化切削轨迹规划与加工参数,开展了2种微结构模具的加工实验,得到尺寸精度小于1.4μm、表面粗糙度小于14nm的结构完整性较好、表面无划痕的模具。实验结果验证了回转对称微结构光学模具B轴旋转加工工艺的可行性。 A B axis rotating machining process based on ultra precision cutting was developed to prevent burrs, sharp corner defects and surface scratches when machining microstructured optical molds with rotational symmetry. The form accuracy and surface quality of the molds were mainly influenced by the machining path, cutting speed, B axis rotating speed and cutting depth. Tests of these factors were used to optimize the cutting trajectory planning and machining parameters. Two microstructured molds were constructed with no sharp corner defects and no surface scratches, dimensional accuracies of 1.4 μm and surface roughnesses better than 14 nm. The results show the feasibility of the B axis rotating machining process for cutting microstructured optical molds with rotational symmetry.
作者 高兴 李勇 钟昊 岳全 李朝将 GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang (State Key Laboratory of Tribology, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments of Control Department of Mechanical Engineering, Tsinghna University, Beijing 100084, China)
出处 《清华大学学报:自然科学版》 EI CAS CSCD 北大核心 2017年第2期120-127,共8页 Journal of Tsinghua University(Science and Technology)
基金 北京市自然科学基金资助项目(3131003)
关键词 超精密切削 B轴旋转加工工艺 回转对称微结构 光学模具 结构完整性 ultra precision cutting B axis rotating machining rotationally symmetric microstrueture optical moldstructure integrity
作者简介 高兴(1987-),男,博士研究生。 通信作者:李勇,研究员,E—mail:liyong@mail.tsinghua.edu.cn
  • 相关文献

参考文献5

二级参考文献107

共引文献33

投稿分析

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部 意见反馈
新型冠状病毒肺炎防控与诊疗专栏